Plasma Cleaner (Parallel Electrode) (PDC610)
Plasma Surface Treatment Device
Features of Plasma Cleaner (Parallel Electrode) (PDC610)
- Compact plasma cleaner for R&D or any other wide range of applications
- Max. RF power 600W
- RIE / DP mode switchable
- Electrodes can be set among 1 to 3 stages
- Integrated data logger can be installed (Optional)
- Matching point memory function can be installed (Optional)
Specifications
| Item Code | 00 |
|---|---|
| Model | PDC610 |
| Plasma Mode | RIE and DP mode changeable by touch panel |
| Electrode Structure | 3-stage independent parallel flat stage |
| RF Power | MAX. 600W |
| Oscillation Frequency | 13.56MHz¡¡Quartz Oscillator |
| Chamber Dimensions | W350 × D270 × H300mm |
| Stage Size | W250 × D220mm x 3 stages |
| Chamber Material | Aluminium |
| Reaction Gas | 2 systems£¨Ar, O2£© |
| Purge Gas | N2 or Dry air |
| Vacuum Pump | Not included |
| Gas Inlet Port | Reaction Gas: 2 points, Purge Gas: 1 point |
| Output Setting | Manual setting on LED touch panel |
| Internal dimensions£¨W×D×H mm£© | 350×270×300mm |
| External dimensions£¨W×D×H mm£© | 600×722×700mm |
| Remarks(dimensions) | 00 |
| Power Source |
AC200 to 415V Three phase with step-down transformer |
| Weight | 180kg |
Maintenance and warranty
Conditions: temperature and humidity: 23 deg.C+/-5 deg.C, 65%RH+/-20% (no load)
External dimensions do not include protrusions.
