Plasma Cleaner (Parallel Electrode) (PDC510)
Plasma Cleaner (Parallel Electrode) (PDC510) PDC Series Plasma Dry Cleaner Plasma Equipment Selangor, Malaysia, Kuala Lumpur (KL), Puchong Supplier, Distributor, Supply, Supplies | Renetech Sdn Bhd Outstanding 0 point stability!! Interior
Plasma Surface Treatment Device
Features of Plasma Cleaner (Parallel Electrode) (PDC510)
  • Small and compact, suitable for R&D or any other dry cleaning processes
  • Simple and compact plasma surface treatment device
  • RIE / DP mode changeable
  • Excellent electrode structure for plasma uniformity
  • Touch panel for easy operation
  • Equipped with 0 point stability vacuum manometer
Item Code 328212
Model PDC510
Plasma Mode RIE and DP mode changeable
Electrode Structure Parallel flat stage
RF Power MAX. 500W
Oscillation Frequency 13.56MHz¡¡Quartz Oscillator
Display LED touch panel
Chamber Dimensions W500 × D300 × H200mm
Stage Size W410 × D210mm
Chamber Material Aluminium
Reaction Gas 2 systems£¨Ar, O2£©
Purge Gas N2 or Dry air
Reaction Gas Flow Control Mass flow controller
Vacuum Pump Not included
Gas Inlet Port Reaction Gas: 2 points, Purge Gas: 1 point
External Dimensions / Weight W700 × D700 × H700mm / Approx. 180kg
Internal dimensions£¨W×D×H mm£© 500×300×200mm
External dimensions£¨W×D×H mm£© 700×700×700mm
Remarks(dimensions) 00
Power Source AC200~415V
Three phase with step-down transformer
Weight 180kg
Maintenance and warranty
Conditions: temperature and humidity: 23 deg.C+/-5 deg.C, 65%RH+/-20% (no load)
External dimensions do not include protrusions.

Please leave your enquiry here, we will reply as soon as possible.

*only support gif, jpeg, jpg, png, pdf
Switch To Desktop Version