Plasma Cleaner (Parallel Electrode) (PDC510)
Plasma Surface Treatment Device
Features of Plasma Cleaner (Parallel Electrode) (PDC510)
- Small and compact, suitable for R&D or any other dry cleaning processes
- Simple and compact plasma surface treatment device
- RIE / DP mode changeable
- Excellent electrode structure for plasma uniformity
- Touch panel for easy operation
- Equipped with 0 point stability vacuum manometer
Specifications
| Item Code | 328212 |
|---|---|
| Model | PDC510 |
| Plasma Mode | RIE and DP mode changeable |
| Electrode Structure | Parallel flat stage |
| RF Power | MAX. 500W |
| Oscillation Frequency | 13.56MHz¡¡Quartz Oscillator |
| Display | LED touch panel |
| Chamber Dimensions | W500 × D300 × H200mm |
| Stage Size | W410 × D210mm |
| Chamber Material | Aluminium |
| Reaction Gas | 2 systems£¨Ar, O2£© |
| Purge Gas | N2 or Dry air |
| Reaction Gas Flow Control | Mass flow controller |
| Vacuum Pump | Not included |
| Gas Inlet Port | Reaction Gas: 2 points, Purge Gas: 1 point |
| External Dimensions / Weight | W700 × D700 × H700mm / Approx. 180kg |
| Internal dimensions£¨W×D×H mm£© | 500×300×200mm |
| External dimensions£¨W×D×H mm£© | 700×700×700mm |
| Remarks(dimensions) | 00 |
| Power Source |
AC200~415V Three phase with step-down transformer |
| Weight | 180kg |
Maintenance and warranty
Conditions: temperature and humidity: 23 deg.C+/-5 deg.C, 65%RH+/-20% (no load)
External dimensions do not include protrusions.
