Plasma Reactor (Barrel Chamber) (PR300)
Compact, Barrel Type, Low Temperature Ashing Device
Features of Plasma Reactor (Barrel Chamber) (PR300)
Flexible setting range of output to cope with a variety of testings
Specifications
Specifications
Item Code | 215006 |
---|---|
Model | PR300 |
System | DP mode, Barrel type |
High Frequency Output | Max. 300W |
Oscillation Frequency | 13.56MHz |
Tuning Method | Manual biaxial |
Reaction Chamber | Pyrex Glass φ64 × 160mm x 3 chambers |
Reaction Gas System | 1 system (oxygen), flow meter |
Control System | Auto pressure regulation and Auto leakage bulb |
Piping Material | SUS, Teflon, copper and brass |
External Dimensions | W438 × D520 × H556mm (without projection£© |
External dimensions£¨W×D×H mm£© | 438×520×556mm |
Power Source |
AC220V Single-phase |
Weight | 36kg |
Maintenance and warranty
- Conditions: temperature and humidity: 23 deg.C+/-5 deg.C, 65%RH+/-20% (no load)
- External dimensions do not include protrusions.