Plasma Cleaner (Parallel Electrode) (V1000XS)
Big capacity model suitable for dry cleaning process such as the removal of organic substances, oxidized film, and for surface cleaning, etching, etc.
Features of Plasma Cleaner (Parallel Electrode) (V1000XS)
- The electrodes can be replaced by specially developed electrodes to improve the plasma efficiency
- High-precision matching unit and highly reliable RF generator
Specifications
Item Code | 328214 |
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Model | V1000XS |
Plasma Mode | DP/RIE |
Oscillation Frequency | 13.56MHz |
RF Power | 1,000 & 1,500W |
Stage Dimensions | 400W × 375D mm, Parallel flat double stage |
Reaction Gas | Mass flow control, 2 system + 1 for purge gas |
Vacuum Pump | Included, Approx. 1,000L/min exhaust volume |
Safety Device | Door switch, Interlock of side panel, Emergency stop switch, Overheat prevention device |
Internal dimensions£¨W×D×H mm£© | 600×554×440mm |
External dimensions£¨W×D×H mm£© | 900×1000×2040mm |
Remarks(dimensions) | Stage dimensions: 400W x 375D mm |
Power Source |
3P 200V to 415V A step-down transformer is required to meet the local voltage (from the local voltage to 3-phase AC200) |
Weight | 00kg |
Maintenance and warranty
Conditions: temperature and humidity: 23 deg.C+/-5 deg.C, 65%RH+/-20% (no load)
External dimensions do not include protrusions.